Study of front-side connected chemical field effect transistor for water analysis
نویسندگان
چکیده
Front-side connected, N-channel, normally-off, chemical field effect transistor (ChemFET) microsensors including a SiO2/Si3N4 pH-sensitive gate have been fabricated using a standard P-well silicon technology. The fabrication and packaging processes are described and sensor properties and performances are demonstrated through pHmeasurements. Finally, the front-side connected ChemFETs microsensors have been adapted to the detection of ions thanks to polyHEMA/siloprene-based ionosensitive membranes. Application is performed through the NH4 and NO 3 ions detection in artificial solutions, evidencing quasi-Nernstian responses (s 50 mV/pH) in the appropriate detection ranges. This microsensor will be used for the monitoring of environmental pollution and more precisely for ground water analysis. 2003 Elsevier Ltd. All rights reserved.
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ورودعنوان ژورنال:
- Microelectronics Reliability
دوره 44 شماره
صفحات -
تاریخ انتشار 2004